JPH0418429U - - Google Patents
Info
- Publication number
- JPH0418429U JPH0418429U JP5851690U JP5851690U JPH0418429U JP H0418429 U JPH0418429 U JP H0418429U JP 5851690 U JP5851690 U JP 5851690U JP 5851690 U JP5851690 U JP 5851690U JP H0418429 U JPH0418429 U JP H0418429U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- pipe
- material gas
- dilution
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims description 10
- 238000010790 dilution Methods 0.000 claims description 9
- 239000012895 dilution Substances 0.000 claims description 9
- 238000001947 vapour-phase growth Methods 0.000 claims description 7
- 239000002994 raw material Substances 0.000 claims description 5
- 239000007789 gas Substances 0.000 claims 32
- 239000000758 substrate Substances 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5851690U JPH0418429U (en]) | 1990-06-01 | 1990-06-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5851690U JPH0418429U (en]) | 1990-06-01 | 1990-06-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0418429U true JPH0418429U (en]) | 1992-02-17 |
Family
ID=31584197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5851690U Pending JPH0418429U (en]) | 1990-06-01 | 1990-06-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418429U (en]) |
-
1990
- 1990-06-01 JP JP5851690U patent/JPH0418429U/ja active Pending
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